World-leading GaN-on-Si and
GaN-on-SiC epi wafers

EpiGaN Expands GaN Epiwafer Production Using Aixtron G5+C MOCVD Technology

EpiGaN, a leading European supplier of Gallium Nitride (GaN) technology solutions for telecom, power electronics, and sensor applications, has chosen an Aixtron G5+C tool to meet growing demand from their global customer base.  

The new AIXTRON AIX G5+C reactor will be installed at EpiGaN’s manufacturing site in Hasselt/Belgium and operational in Q1/2019. The fully automated Planetary© MOCVD system features in-situ chamber cleaning and enables configurations of 8x6 inch, or 5x8 inch epitaxial wafers to be automatically loaded and removed from the system in an enclosed cassette environment.

You can read the full press release here.

^ Top